Study of High K Material for Extremely Large Scale Integrated Circuit
Time:2015-08-07 03:21 Source:未知 Author:chenxiaoqing  Click: 1831

Research Subject:

Synthesis of metal organic hafnium and zirconium precursor for high k material
Principal Investigator:
Prof. Yi PAN
Research Content & Progress:
The project focuses on the design and synthesis of metal organic hafnium and zirconium precursor, which includes preparation of the known good hafnium precursor, and three to five new hafnium or zir-conium precursor.
Now, we have finished the synthesis of known hafnium or zirconium precursor. The design and synthe-sis of new precursor are being studied.